19th IEEE International Conference on Micro Electro Mechanical Systems > 494 - 497
Source
Abstract
Identifiers
book ISSN : | 1084-6999 |
book ISBN : | 0-7803-9475-5 |
DOI | 10.1109/MEMSYS.2006.1627844 |
book ISSN : | 1084-6999 |
book ISBN : | 0-7803-9475-5 |
DOI | 10.1109/MEMSYS.2006.1627844 |