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The microscopic reversibility of gas–surface collisions is discussed and analyzed using the direct simulation Monte Carlo method for different scattering kernels. A testing procedure for the reversibility analysis is described. Then, the thermal transpiration phenomenon is studied numerically for free molecular flow through short and long capillaries using Maxwell, Cercignani–Lampis, and Epstein scattering...
The thin film preparation of Se, Ge, Sn monolayers and also binary chalcogenide alloys with their various structures and morphologies have been thoroughly studied. A new phase of the composite materials was identified. The short range ordering structure of chalcogens when mixed up with four-fold-coordinated atoms like Ge and Sn produce alloys or compounds with a certain specific characteristic. Laser...
In the present study, some mechanical properties of borides formed on the impurity-controlled plain carbon steel essentially containing 0.3% C, 0.02% P in weight was investigated. The formation of borides on the concerned steel was performed in a bath having borax, boric acid and ferro-silicon at 940°C for various length of time between 1/2 and 10h. Optical and scanning electron microscope (SEM) studies...
Deposition of amorphous silicone-like (Si:O x :C y :H z ) thin films in a remote RF hollow cathode discharge plasma using hexamethyldisoloxane as monomer and Ar as feed gas has been investigated for films optical constants and plasma diagnostic as a function of RF power (100–300W) and precursor flow rate (1–10sccm). Plasma diagnostic has been performed using Optical Emission...
Spray pyrolysis deposited indium-tin oxide (ITO) thin films were fabricated and irradiated using Au 8+ swift heavy ions (SHI) (100MeV energy), at different fluency doses ranging between 1×10 11 ions/cm 2 and 1×10 13 ions/cm 2 . After irradiation, significant changes have been observed in surface morphology and crystallographic structure pertaining to increase...
The relative densities of SiCl n (n=0–2) in SiCl 4 radio frequency (rf) glow discharge plasma are measured by mass spectrometry. The effects of discharge parameters, including rf power, discharge pressure, substrate temperature and SiCl 4 flow rate on the relative densities of SiCl n (n=0–2) are investigated in detail. The experimental results demonstrate that the relative...
ZnO nanowires with excellent photoluminescence (PL) and field-emission properties were synthesized by a two-step method, and the ZnO nanowires grew along (002) direction. PL measurements showed that the ZnO nanowires have stronger ultraviolet emission properties at 376nm and there is 3nm blue shift after the nanowires were immersed in thiourea (TU) solution compared with those of without immersion...
The optical properties of cupric telluride (CuTe) thin films have been studied in the wavelength range 310–800nm using spectroscopic ellipsometry (SE). Thin films of thickness between 30 and 150nm were prepared by thermal evaporation at the rate of 15.6Å/s on well cleaned glass substrates kept at 300K under the vacuum better than 2×10 −5 mbar. It has been found that the optical band gap increases...
The relative density of O atom of Ar–O2 remote plasma excited in a low-pressure 13.56MHz hollow cathode discharge system has been investigated. The measurements were carried out at a total pressure of 0.05mbar, radiofrequency (RF) power of 200W and at three different axial distances in the plasma chamber below the outlet of the discharge source. Using optical emission spectroscopy (OES), the relative...
Experimental ellipsometric studies of Hf 1−x Ti x O 2 thin films were carried out to determine refractive indices as well as spectrometric studies of these films were carried out to determine interferential transmission spectra. The dispersion curves of the refractive indices are well described by the optical-refractometric relation. Compositional dependences of optical...
Hydrogenated amorphous silicon (a-Si:H) films have been deposited with pure silane and then annealed with atomic hydrogen at lower temperature (T s =170°C) in a novel, hot wire assisted microwave electron cyclotron resonant chemical vapor deposition system (HW-MWECR-CVD). The experimental results showed that the total hydrogen concentration (C H ) in the film decreased with H 2...
By annealing of precursors, SnO 2 nanorods or nanowires have been synthesized by the oriented aggregation of initial SnO 2 nanoparticles. Chlorine salts are very important for both preventing increase in size of the precursors and providing aqueous and kinetic circumstances that cause the oriented aggregation of the initial nanoparticles. The possible growth mechanism of SnO 2...
An AlN epitaxial film without projections or spiral growth features was successfully fabricated on a (0001) sapphire substrate by reactive laser ablation of a liquid Al target in NH 3 using a 248nm laser. The liquid Al target was prepared with an electron beam in a rotating crucible. The surface of the rotating liquid Al target was always smooth. Spiral growth features were greatly suppressed...
Thin-film growth process of InTaO 4 on MgO substrates held at 700°C is analyzed on the basis of the thickness dependence of the structure determined by X-ray diffraction analysis and the composition determined by X-ray photoemission spectroscopy. Monoclinic InTaO 4 thin film grows at thicknesses above a critical value, while the amorphous phase grows at thicknesses below the critical...
Plasmas play a critical role in depositing thin films or etching fine patterns while manufacturing integrated circuits. A new model for plasma diagnosis is presented. This was accomplished by linking atomic force microscopy (AFM) to plasma parameters using a neural network. Experimental AFM data were collected during the etching of silicon oxynitride films in C 2 F 6 inductively coupled...
The development of modern (thin-bladed) turbomolecular high-vacuum pumps began in 1957 with the demonstration of the possibility of obtaining high compression ratios with axial flow compressors in the molecular flow regime. Thirty years later, such pumps had become the major method for high vacuum pumping. It had been apparent from the beginning that pneumatic compressors can be useful at any pressure...
Uniformity doping, δ-doping and growth-interruption doping to produce gallium nitride (GaN): Mg has been investigated by low-pressure metal-organic chemical vapor deposition (LP-MOCVD). It was demonstrated by electrical, optical, and surface studies that films produced by growth-interruption-Mg-doping produce the best crystal quality, this doping method increasing self-compensation because of the...
Based on two-temperature magnetic hydrodynamic (MHD) model, the influence of saddle-shaped distributed axial magnetic field (AMF, linearly increases along radial position) and bell-shaped distributed AMF (linearly decreases along radial position) on plasma loss and heat flux density to anode in subsonic high-current vacuum arc (HCVA) is simulated and analyzed. According to the simulation results,...
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