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INFM – University of Lecce, via per Arnesano, 73100 Lecce , Italy ENEA, CRE-Casaccia, via Anguillarese 301, 00060 Rome , Italy ENEA, C.R. Frascati, Via E. Fermi 27, Frascati, 00044 Rome , Italy PASTIS-CNRSM, SS.7 Appia km 712, 72100 Brindisi , ItalyHafnium oxide (HfO2) films were deposited on silica and glass substrates by ion (Xe+) assisted deposition with increasing ion momentum transfer to the growing film. The relationship among the ion momentum values, the crystalline phase and the refractive index (packing density) has been worked out by means of X-ray diffraction and spectrophotometric analysis. Compaction of the films by ion beam assistance is clearly evidenced by the changes in their microstructure. A three steps transition from a random monoclinic phase, via amorphous phase, up to an highly phase oriented (fiber texture), as a function of ion momentum, has been found.Keywords: Optical coatingsIon bombardmentX-ray diffractionOxides
INFM – University of Lecce, via per Arnesano, 73100 Lecce , Italy ENEA, CRE-Casaccia, via Anguillarese 301, 00060 Rome , Italy ENEA, C.R. Frascati, Via E. Fermi 27, Frascati, 00044 Rome , Italy PASTIS-CNRSM, SS.7 Appia km 712, 72100 Brindisi , ItalyHafnium oxide (HfO2) films were deposited on silica and glass substrates by ion (Xe+) assisted deposition with increasing ion momentum transfer to the growing film. The relationship among the ion momentum values, the crystalline phase and the refractive index (packing density) has been worked out by means of X-ray diffraction and spectrophotometric analysis. Compaction of the films by ion beam assistance is clearly evidenced by the changes in their microstructure. A three steps transition from a random monoclinic phase, via amorphous phase, up to an highly phase oriented (fiber texture), as a function of ion momentum, has been found.Keywords: Optical coatingsIon bombardmentX-ray diffractionOxides