ZnO rod /In 2 S 3 /CuInS 2 type ETA-cells were prepared by in-line chemical spray pyrolysis method. Effects of buffer layer thickness and ZnO nanorod length (500–1000nm) were studied by means of SEM, I–V dependencies and EQE spectra. Conformal layer of In 2 S 3 , obtained by spray of solution with pH=4.8, effectively protects ZnO nanorods from dissolution during the spray of acidic solutions. Increasing In 2 S 3 layer thickness reduces fluctuations of the cell output parameters, and increases V OC and FF; however, at certain thickness induces losses due to light absorption. The highest conversion efficiency 4.17% at AM1.5 was recorded from small contact area of the cell based on rods with length of 600nm. Perspectives for further development are discussed.