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Micro-machining techniques based on the LIGA X-ray lithographic process have been applied to liquid spray atomization. Gas flow orifices were produced with diameters below 10 μm and large depth-to-diameter ratios (23:1). Electrodeposited nickel membranes, 25 mm in diameter and up to 0.16 mm thick were produced containing 4200 gas flow orifices. The membranes were used to control the interface between...
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