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The time dependence of interfacial potentials is analysed approximately in terms of the space charge polarization and the diffusion within the membrane for ion-conducting thin films (≤ 100 nm) used in field effect-based sensors. Results are experimentally verified at aluminosilicate thin films fabricated by ion implantation. The polarization leads to an initial transient and a potential displacement by about 52--59 mV per 1 V polarizing voltage. Bulk membrane diffusion is characterized by a diffusion coefficient for sodium ions of 5 10 13 --7 10 -13 cm 2 s -1 .