Metrology and Measurement Systems > 2022 > Vol. 29, nr 1 > 109--125
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journal ISSN : | 0860-8229 |
journal e-ISSN : | 2300-1941 |
DOI | 10.24425/mms.2022.138545 |
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Bibliography
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[2] Xu, W., Song, K., Ma, S., Gao, B., Chiu, Y, & Lee, Y. K. (2016). Theoretical and experimental investigations of thermoresistive micro calorimetric flow sensors fabricated by CMOS MEMS technology. Journal of Microelectromechanical Systems, 25(5), 954-962. https://doi.org/10.1109/JMEMS.2016.2596282
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[3] Silvestri, S., & Schena, E. (2012). Micromachined flow sensors in biomedical applications. Micromachines, 3(2) 225-243. https://doi.org/10.3390/mi3020225