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A novel micro-electro-mechanical systems (MEMS) fabrication process for self-assembled antennas has been characterized. Self-assembled vertical monopole antennas were previously reported [1]. The vertical on-chip antennas provide higher efficiency over conventional planar on-chip antennas. However, the metallization step of the antennas was performed after the release and self-assembly of the devices...
Single-walled carbon nanotubes (SWNTs) can exhibit large electromechanical responses to strain and are therefore promising candidates for next generation nano-electromechanical systems (NEMS). A platform for SWNT integration is presented that aims for strainable, TEM-compatible field-effect transistors, useful for both fundamental investigations and new device concepts. Here, we show the first chirality...
We present the first successful wirebonding on thick SU-8 actuators reported in the literature with a thorough investigation to determine the best processing conditions to produce reliable electrical connections to SU-8 MEMS structures. We measured the yield and mechanical strength of gold ball bonds for a variety of processing conditions on SU-8 structures up to 100 mum thick covered with a thin...
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