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A passive thermal micro-actuator with large area specific work and large displacement, fabricated of electroplated nickel on a silicon substrate is presented. The actuation relies on the thermal expansion of beams in a V-shaped geometry. Two V-shaped beam stacks are aligned opposite to each other and are coupled to a lever transmission. The actuator exhibits low energy losses due to the deformation...
This paper presents a topology-optimized passive thermal micro actuator with large thermal deflection. The actuator relies on different coefficients of thermal expansion of an active material as well as the substrate and temperature changes of the surrounding environment. COMSOL Multiphysics is used for the topology optimization algorithm. The resulting shape is approximated by straight beams for...
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