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We report a near infrared photodetector that is able to detect different wavelengths by actuating a tilting mirror. The photodetection is based on a Schottky junction and the surface plasmon decay on an Au grating. The titling mirror changes the incident angle to couple light with specific wavelength to surface plasmon. In this paper, we confirmed that the grating of the proposed photodetector can...
An absolute pressure sensor based on liquid cantilever diaphragm is described in this paper. The diaphragm was fabricated by using liquid to bridge the gap between a piezo-resistive cantilever and the surrounding walls. Due to surface tension, the liquid filled the cantilever's gap while it did not leak through the gap. A cavity was designed under the diaphragm as a reference pressure. By choosing...
We propose a Surface Plasmon Resonance (SPR) photodiode (PD) detector using transportation phenomenon of photon and electron coupling. Since SPR is usually measured by reflection intensity, a large space for measuring the intensity is required. Thus, we develop an SPR detector, which can detect an SPR condition without measuring the reflection intensity as shown in Figure 1(a). In this paper, we show...
We propose a triaxial force measurement cantilever with piezoresistors fabricated by rapid thermal diffusion sidewall-doping. The device is developed as a tool for applying quantitative mechanical stimuli to cells and measuring their mechanical properties at the same time. The device consists of a sensing tip, two sensing beams, and four wiring beams. We form piezoresistors on the surface of the sensing...
We propose a force sensor based on gold nanoparticles, which enable optical detection of force by measurement of the scattering light spectrum. Gold nanoparticles were dispersed on an elastomer sheet. The scattering spectrum changes due to strain were observed to investigate applicability of the sensor to force measurement. The force deforms the elastomer sensor body, and increases the interparticle...
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