The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
A micromachined electrostatically suspended gyroscope (MESG), with a wheel-like rotor housed by stator electrodes, using LIGA-type microfabrication technology, was presented. Based on two capacitive detecting schemes, where common electrodes are used as signal pickoff and excitation, respectively, a unified multi-objective optimization design model of the structural parameters of the MESG is established...
This paper presents modeling and system-level simulation of a micromachined electrostatically suspended gyroscope (MESG). The MESG reported here employs a spinning wheel-like rotor, which is suspended by electrostatic force without any mechanical support. With the precession of the rotor sensed capacitively, stator electrodes rebalance the rotor to its null position by an electrostatic feedback control...
An electrostatically levitated gyroscope based on UV-LIGA fabrication process is introduced. The stable levitation is vitally important for the gyroscope to work efficiently. Two types of levitation control model of such a device are presented to realize initial levitation. The axial squeeze film damping coefficient is calculated by finite element analysis and deduced by analytical solution. From...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.