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This work aimed to construct a new equivalent circuit which is useful for the further studying of the resonator in the piezoelectric gyroscope. Measurements of the actual admittance circle are used to improve the parameters of the Van Dyke's model. Meanwhile, a parallel resistance to form the new equivalent circuit through analysis is added. The relative error of phase and impedance are 0.335 and...
A novel electrostatically suspended gyroscope based on MEMS technology is presented in this article, including its structure and basic principle of electrostatic suspension. Especially integrated control strategy and position feedback PID control method of the Z-axis suspension system are analyzed. From the simulation result based on Lab VIEW model we can see that the gyroscope rotor can be suspended...
A micromachined electrostatically suspended gyroscope (MESG), with a wheel-like rotor housed by stator electrodes, using LIGA-type microfabrication technology, was presented. Based on two capacitive detecting schemes, where common electrodes are used as signal pickoff and excitation, respectively, a unified multi-objective optimization design model of the structural parameters of the MESG is established...
This paper presents modeling and system-level simulation of a micromachined electrostatically suspended gyroscope (MESG). The MESG reported here employs a spinning wheel-like rotor, which is suspended by electrostatic force without any mechanical support. With the precession of the rotor sensed capacitively, stator electrodes rebalance the rotor to its null position by an electrostatic feedback control...
This paper presents a novel micro-gyroscope which is resistant to shock and sensitive to biaxial applied angular velocity. This device has very simple structure and is completed solid. The vibration of piezoelectric bulk (PZT), which is excited in special resonance mode, is used as reference vibration. When angular velocity is applied to x or y axis, voltage is generated by coriolis force at different...
A novel kind of MEMS micro-gyroscope, piezoelectric micromachined modal gyroscope (PMMG), is introduced in the paper. PMMG works with the special vibratory mode of solid material, and it is a kind of solid-state micro-gyroscope, which is different from micromachined vibratory gyroscope. There is no moving part and suspended structure in PMMG, and it is robust for the higher resistance to shock and...
We present here a single-neuron spinning control system (SSCS) for a novel non-silicon rotational MEMS gyro with an electrostatically levitated thick-film Ni rotor. The heavier Ni rotor can provide larger moment of inertia and higher spinning stability than its Si counterpart. With the SSCS, the deficiency of the nonlinear spinning dynamic nature of the gyro can be adaptively tackled. In addition,...
An electrostatically levitated gyroscope based on UV-LIGA fabrication process is introduced. The stable levitation is vitally important for the gyroscope to work efficiently. Two types of levitation control model of such a device are presented to realize initial levitation. The axial squeeze film damping coefficient is calculated by finite element analysis and deduced by analytical solution. From...
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