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In this paper, we report in-line wafer level hermetic packages (WLP) for MEMS variable capacitors. The beam structure of MEMS vibrates strongly under decompression. Since this vibration causes RF noise, it is necessary to set the pressure around the beam structure at 40000Pa or greater. Therefore, a structure that carries out a resin seal of the hole for etching the cap of a formed in the sacrificial...
This study is an investigation of the way to reduce the particle count by using optical emission spectroscopy (O.E.S.). From the results of O.E.S. analysis, it is revealed that the chamber cleaning seriously affects the particle count. The result of our experiment shows that the particle count depends both on CF4 gas flow rate and bias power. By changing the cleaning conditions to lower bias power...
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