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The effects of colloidal silica on the CMP of Molybdenum (Mo) are investigated in different slurries with H2O2 as oxidizer. It is found that both RR (removal rate) and SER (static etching rate) decrease after adding colloidal silica into the alkaline slurry. The adsorption between the colloidal silica particles and Mo film is observed. Raman spectra show that silicomolybdic acid forms from reaction...
The bamboo-based composites can significantly contribute to the efficiency and utilization of bamboo. In this work, the chemical components, volume fraction of bamboo tissues, characteristics of single fiber, structure and mechanical properties of ci bamboo and moso bamboo were used to evaluate the suitability for manufacturing bamboo-based composites, and then the bamboo-based fiber composites (BFC)...
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