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We report on cerium substituted bismuth dysprosium iron garnet of composition Bi1.3Ce0.3Dy1Fe5O12 prepared by biased target ion beam deposition on a fused quartz substrate and postdeposition crystallization through rapid thermal annealing in air. The resulting thin film garnet achieved promising magnetic and magneto-optic (MO) properties on a low cost amorphous substrate and with reduced thermal budget...
We report issues associated with the calibration of a biased target ion beam deposition system. Variations in deposition rates and oxygen flow have been observed when depositing individual metal oxide films immediately after films deposited from different targets as compared to depositions following films from the same target.
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