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Using a circular beam separator to deflect the primary beam of an SEM through 90deg, an aberration limited final probe size of 7-8 nm has been achieved in experiments. This limit was shown to be due to magnetic leakage fields from the post-deflector lens and not due to aberrations of the beam separator. In fact, it is concluded that the beam separator aberrations are within 2 nm over a 1 mum by 1...
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