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A study of the effect of substrate temperature on oblique-angle sputtered galium-doped zinc oxide (GZO) thin films was carried out. Both the oblique-angle sputtering and the substrate temperature lowered the resistivity of GZO thin films down to 4 × 10-3 Ωcm together with an increase of their optical transmittance over 90%.
Surface treatment by means of pulsed laser beams in reactive atmospheres is an attractive technique to enhance the surface features, such as corrosion and wear resistance or hardness. Among all laser types, the free electron laser (FEL) is relatively new for materials processing, its main peculiarities being the high power, pulse structure, high repetition rates and macropulse forming. So the FEL...
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