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Industrialized silicon solar cells were fabricated using silane-free silicon carbon nitride (SiCxNy) film as an antireflection (AR) and surface passivation layer. Sixtron Advanced Materials has developed a gas generation system to deposit the dielectric film that uses a polymeric solid source. Sixtron eliminates the cost and hazards associated with storing and handling pyrophoric silane gas. The electrical...
Silicon carbon nitride (SiCxNy) antireflection (AR) coating layer has been coated using a novel silane-free processs and aparatus for a solid source developed at SiXtron Advanced Materials to eliminate the storage and handling of dangerous pyrophoric silane gas. The electrical and optical properties of the new AR coating layer are investigated and compared with those of SiNx films coated with SiH4...
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