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In this paper, a bulk micro machined lateral-axis TFG (tuning fork gyroscope) with improved architecture and combined mechanism sensing capacitors is reported. The combined sensing capacitors make the TFG have high sensitivity and good linearity even under wide input range and fabrication imperfection. Moreover, the decoupled comb drive, together with the improved architecture, can efficiently decouple...
A latching acceleration switch with cylindrical contacts is presented in this paper. The cylindrical contacts can make the switch immune to the fabrication imperfection and off sensitive axis shocks, as well as decrease the contact resistance. Moreover, all the contacts and their beams are separated from the proof-mass so as to prevent the contacts from the impact resulting from the rebound or vibration...
A decoupled lateral-axis TFG (tuning fork gyroscope) with novel driving and sensing combs is presented. The EFBD (electrostatic force balanced comb driver) adopted in the TFG can efficiently suppress the mechanical coupling in a simple manner. The structure of the gyroscope is also optimized to suppress the coupling further. Moreover, torsional sensing combs are adopted to detect the out-of-plane...
In this paper, a bulk micromachined lateral axis TFG (tuning fork gyroscope) with torsional sensing comb capacitors is presented. Both driving and sensing modes of the gyroscope are dominated by slide film air damping, then it can work even at atmosphere. Novel driving comb capacitors are used to electrically decouple the mechanical coupling from sensing mode to driving mode. The process for this...
An acceleration latching switch with independent multi-contacts is presented in this paper. All the contacts and their beams are independent to the proof-mass so as to prevent the contacts from the impact resulting from the rebound or vibration of the proof mass once the switch is latched. Moreover, multiple contacts are used in order to get high reliable contact, to lower the contact resistance and...
Offset error mechanisms in a single-ended chopper-stabilized amplifier are investigated. The error models and their prediction equations are given. This work also presents a new analytical approach for estimating the switch error in a four-transistor chopping network. A new resistance balancing circuit technique is also introduced, which permits further reduction of DC offsets in conventional chopping...
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