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Monolithic three-dimensional (M3D) CMOS-nanoelectromechanical (CMOS-NEM) reconfigurable logic (RL) circuits are experimentally demonstrated. This is the first experimental demonstration of 65-nm M3D CMOS-NEM RL circuits satisfying the 1.2-V supply voltage (${V}_{\mathsf {DD}}$ ) requirement of the 65-nm technology node. The fabrication process is identical to the conventional 65-nm CMOS baseline...
Ag nanostructure has been widely used for optical sensing applications for localized surface plasmon resonance (LSPR). Many efforts have been tried to fabricate and control silver nanostructure. The pore diameter of the nanoporous alumina mask with through-holes was controlled by two-time dipping in 5 wt% phosphoric acid at 30 °C. Using the nanoporous alumina mask as an evaporation mask, size-controlled...
Plasmonic materials have attracted considerable attention because of scientific interest and their potential applications. Using the nanoporous alumina mask as an evaporation mask, Ag nanodot array was directly formed on indium-tin-oxide glass. Its optical properties are studied.
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