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Parylene-C microfibrous thin films ($\mu $ FTFs), grown using oblique-angle physicochemical vapor deposition, were examined for potential use as low-relative-permittivity (i.e., low-$\kappa $ ) interlayer dielectrics in integrated circuits and, more importantly, flexible electronics. These films were characterized using capacitance–voltage–temperature (CVT) and current–voltage–temperature experiments...
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