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A low-temperature bonding process for packaging surface acoustic wave (SAW) and lead zirconate titanate (PZT) microdevices was developed by the surface activated bonding (SAB) method from room temperature to 100°C. An intermediate gold layer was used in the bonding. The required bonding pressure was optimized. To compare this method with conventional thermocompression bonding and thermosonic bonding...
In-home healthcare and smart nursing are highly promoted recently by progress and advances in micro electromechanical systems (MEMS) and wireless sensor network (WSN) technology. In this work, a piezoelectric lead zirconate titanate (PZT) thin film actuated and sensed single crystal silicon disk resonator with excellent system integration capability, low driving voltage and great mechanical quality...
Theory of the propagation of transverse surface waves in piezoelectric ceramic/metal coupled media is developed. Dispersion equations relating phase velocity to material constants for the existence of various modes are obtained in simple mathematic form for a piezoelectric material of class 6 mm. Piezoelectricity allows a nonleaky but dispersive wave of one or two modes to exist under conditions when...
This paper investigated the effects of rapid thermal annealing (RTA) on nucleation and growth behavior of sol-gel derived lead zirconate titanate (PZT) films. The effects of RTA on films' surface morphology, residual stress and orientation were also studied. It was found that residual stress of the film can be effectively reduced by extending the RTA time. High heating-rate was preferred for uniform...
The nucleation and growth behavior of sol-gel-derived lead zirconate titanate (PZT) films was investigated at different rapid thermal annealing (RTA) processes. The effects of RTA on PZT film surface morphology, crystal orientation, residual stress, and properties were also studied and are discussed. PZT nucleation and growth behavior were found to be more sensitive to heating rate than to hold time...
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