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We designed and fabricated Nb5N6 microbolometers integrated with five staircases square diffractive lens array (DLA) for THz detection. It gives us a method for designing diffractive lens to improve the coupling efficiency of the incident power into the Nb5N6 microbolometers. We measured the voltage response of the Nb5N6 microbolometer integrated with diffractive lens. We find it has 30 times larger...
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