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We designed and fabricated Nb5N6 microbolometers integrated with five staircases square diffractive lens array (DLA) for THz detection. It gives us a method for designing diffractive lens to improve the coupling efficiency of the incident power into the Nb5N6 microbolometers. We measured the voltage response of the Nb5N6 microbolometer integrated with diffractive lens. We find it has 30 times larger...
A novel room-temperature microbolometer for terahertz wave is described in this paper. Each microbolometer in the array consists of a Nb5N6 thin film microbridge and a dipole planar antenna. Such antenna-coupled microbolometer behaves very well for detecting signals from 0.2 THz to 0.32 THz, thanks to the fact that the temperature coefficient of resistance of the Nb5N6 thin film is as high as −0.7%...
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