The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
In the present study, the surface morphological features and nanomechanical properties of GaN and Al0.08Ga0.92N thin films are investigated by means of atomic force microscopy (AFM) and nanoindentation techniques, respectively. The GaN and Al0.08Ga0.92N thin films are deposited on c-plane sapphire substrates by using the metal-organic chemical vapor deposition (MOCVD) method. The films thickness of...
The anisotropic magnetoresistance (AMR) in epitaxial Au/Fe(001) bilayers grown on MgO(001) substrate was systematically studied as a function of Au thickness over the temperature range 6300K. The AMR oscillates with a period of about 1.8 nm in Au thickness at low temperatures and also oscillates at certain higher temperatures. Such novel oscillatory AMR behavior is attributed to quantum well states...
A robust poly opening polish (POP) CMP for replacement metal gate (RMG) application has been developed to meet the criteria of High-k metal gate (HKMG) devices at 28nm technology node. From the previous performance of POP CMP, the uniformity and loading was an important factor of product with HKMG. The polish rate and selective of platen 2, which were key physical characters, was taken to study by...
Phase-change memory (PCM) represents one of the best candidates for a “universal memory”. However, its slow SET speed, high RESET power, and high resistance drift present key challenges towards this ambition. Here, grain-engineered Ge2Sb2Te5 is exploited to control the crystallization kinetics, and electrical properties of PCM. We report 120 % higher SET speeds with respect to conventional scaling...
The PECVD silicon oxy-nitride film has been widely used as antireflective coating (ARC) and contact etch stop layer (CESL) in IC fabrication. It is typically deposited using SiH4&N2O gas mixtures at temperatures around 400°C, with film properties such as reflective index, wet etch rate, stress and uniformity controlled by varying gas flows, RF powers, temperature and pressures. In addition, the...
This paper presents an investigation on the fluorescent properties of semiconductor CdTe quantum dots (QDs) self-assembled on the surface of PVP (polyvinylpyrrolidone) capped silver nanoparticles (NPs) film by ligand field effect under the two photons excitation of 800nm femto second laser. A significant enhancement by 4.5-fold in the integrated fluorescence intensities, red shift of fluorescence...
In this work, phase shifting performance of atomic layer deposited (ALD) films and ferroelectric films had been measured on flexible substrates. ALD ZnO and PVDF/TrFe films were patterned on signal electrode of coplanar waveguide, and their phase shifting performance was collected with a Vector Network Analyzer (VNA) in combination with coplanar microwave probes between 1 GHz to 50GHz.
Due to their influence on the mechanical properties, residual stresses in thin films have become an important topic in materials science. The elastic constants are required to determine the residual stresses using X-ray diffraction method. The elastic constants of Cu thin films with ideal fibre textures were calculated using the Voigt, Reuss and Hill model in the present work. The results show that...
Applications of a novel epoxy based dry film photoresist, PerMX3000, have been investigated in this work in case of 3D structure architecture, micro-fluid tunnel, and wafer surface molding. For different package level requirements, such material provides high resolution patterning ability for narrow pitch layout design; controllable side wall shape from positive slope to negative slope; good adhesion...
In this paper, the pharmacodynamic effects of porous PTFE/PE/PP electret meloxicam patch on anti-inflammatory and analgesia were evaluated. The results showed that electret meloxican patch took advantage of the pharmacological effects of meloxicam and characteristics of electret that can adjust skin in biological electret state and weaken pain caused by injure and enhance the effect of analgesia and...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.