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In this paper, two different micron-scale negative refraction index metamaterials with fine flexibility are proposed. The proposed metamaterials are composed of “Quasi-S” structure and “H” structure respectively. Different from conventional metamaterials, the designs proposed in this paper apply to perpendicular incident waves. Both metamaterials are designed and optimized for sub-terahertz application...
The integration of micro electromechanical systems (MEMS) with ICs is one of the key technologies for MEMS ubiquitous applications and commercialization. This paper therefore presents a high sensitive micro disk resonator with on-disk piezoelectric PZT thin film as the transducer for better impedance matching to CMOS, and for disk self-actuation self-sensing at low actuation voltage and low power...
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