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Superlattice Structures
In article number 2306350, Jun Yang, Kornelius Nielsch, and co‐workers report the thermoelectric performance of SbOx/Sb2Te3 multilayers synthesized via atomic layer deposition. The SbOx layers act as a potential barrier to filter out the low‐energy charge carriers. A remarkable power factor of 520.8 μW m−1 K−2 and low thermal conductivity of 0.4 W m−1 K−1 were obtained.
Nanoscale superlattice (SL) structures have proven to be effective in enhancing the thermoelectric (TE) properties of thin films. Herein, the main phase of antimony telluride (Sb2Te3) thin film with sub‐nanometer layers of antimony oxide (SbOx) is synthesized via atomic layer deposition (ALD) at a low temperature of 80 °C. The SL structure is tailored by varying the cycle numbers of Sb2Te3 and SbO...
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