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An interesting Pd-AlGaN/GaN Schottky diode-type hydrogen sensor with ultrahigh sensing responses is fabricated and studied. A sensing response (SF) of 2.04 times 105 and a widespread Schottky barrier height variation (DeltaphiB) of 400 meV are observed upon exposure to a 9660 ppm H2/air gas at 150degC. The high sensing response can be attributed to the catalytic capability of Pd metal with contributions...
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