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To protect organic flexible devices from the ambient, they have to be encapsulated. Depending on the application in mind (OLED lighting, PV) different thin-film encapsulation methodology can be chosen. Each encapsulation process has different requirements and fabrication process freedom might be restricted, for example by mechanical reliability requirements or the total cost of the end product. Here...
Pulsed dc dual magnetron sputtering was used for preparation of photocatalytic crystalline TiO2 films. The depositions were performed in an Ar + O2 gas mixture at a total pressure of 0.9 Pa with an oxygen partial pressure of 0.2 Pa. The maximum substrate surface temperature was 160 °C. Both magnetrons operated in the same asymmetric bipolar mode at the repetition frequency of 100 kHz with a fixed...
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