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A method to improve pattern critical dimension (CD) and reduce the metal residue level during gold (Au) and chrome (Cr) wet etch processes in MEMS devices is investigated. Instead of traditional single-step wet etch process, a multi-step wet etch method is used to etch Au with the etchant formulated by potassium iodide, iodine and deionized water (KI/I2/H2O). Compared with the single step wet etching...
Traditional diagrams in distribution system are manually generated and maintained according to the information provided by Geographical Information Systems (GIS), which is very time consuming and error prone. Diagram automatic generation has been developed to solve such problems. However, these methods focus on the layout and auto-mapping of devices without distinction and classification which may...
As the development of economic and society, the reliability of distribution system is more important than ever. Traditional distribution automation has developed a lot in order to cope with the evolution of smart distribution system and to meet the reliability and other requirements such as security, economical, efficiency and clean. In this article, we focus on the technology framework and functions...
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