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This paper presents the interconnection of single-walled carbon nanotube (SWNT) between electrodes on a CMOS integrated circuit chip made by TSMC 0.35 mum CMOS process. Alternating current dielectrophoretic force (AC-DEP) method is employed to micro-electrode that makes SWNTs deposited between electrodes. Using electroless nickel and immersion gold to cover the electrodes of Al could really increase...
This paper presents the interconnection of single - walled carbon nanotube (SWNT) between electrodes on a CMOS integrated circuit chip made by TSMC 0.35 ??m CMOS process. Using Electroless Nickel and Immersion Gold to cover the electrodes of Al could really increase the current more than 3 orders when SWNTs are connected between electrodes. One of the applications to this chip may be gas sensing,...
This study presents a 3-Axis CMOS MEMS Accelerometer include novel post CMOS MEMS processes which is used to fabricate Z-axis capacitance accelerometer, utilizing processes combined with TSMC 0.35um 2P4M Standard CMOS Process and the method of wet etching process to etch the Aluminum metal structure in order to form the suspension structure composed of multi-layer metal and via layer. The sensing...
The effects of pressure on liquid phase electrical discharge was investigated using a stainless steel high pressure reactor combined with a high voltage pulse forming network. The initiation breakdown voltage was obtained under various pressures up to 1379000 pascal (200 psi). The discharge characteristics including current and voltage waveforms as well as power per pulse were recorded. The effect...
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