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Zirconia doped with yttrium, widely known as yttria‐stabilized zirconia (YSZ), has found recent applications in advanced electronic and energy devices, particularly when deposited in thin film form by atomic layer deposition (ALD). Although ample studies reported the thermal conductivity of YSZ films and coatings, these data were typically limited to Y2O3 concentrations around 8 mol% and thicknesses...