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As in other semiconductor industries, there is a strong trend to use larger wafer diameters for the fabrication of power devices. However, for wafer diameters above 200 mm float-zone (FZ) silicon which is traditionally used for IGBTs is not available. Therefore, there is a need to use silicon material which has been fabricated by the magnetic Czochralski (Cz) method to make use of 300 mm wafers for...
Highly substrate integrated microwave circuits for space applications require a high metal pattern accuracy for transmission line structures and components. Within this work an embedded 60 GHz strip line filter is used as a demonstrator device to compare four fine line structuring processes for multilayer Low Temperature Cofired Ceramics (LTCC). Fine line screen printing (type I), resinate thin film...
For wireless high-data-rate applications, channel sounding, and radar sensors, the unlicensed frequency band around 60 GHz is of relevant commercial interest. Currently, there is enormous progress in the field of integrating 60 GHz technology in compact systems using multilayer technology and reducing costs for mass production. For full channel characterization, but also for consumer applications,...
With contributions to the solution of the important general future problems as energy supply, environmental protection, material development, and progress in medicine during the last years the technology of microwave generated plasmas developed to a scientific discipline of high social relevance and of great economical importance. Based on the fundamental plasma parameters and their relation to the...
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