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This WeThis paper reports a MEMS-based Fourier transform spectrometer (FTS) with small size, high resolution, fast sampling and low cost. The MEMS scanning mirror can generate over 300 μm piston motion at 10 Hz with only 7Vpp and maintain a very small tilting less than 0.03°. This high scanning performance is achieved by an innovative three-level ladder actuator design and a unique placement of sixteen...
A novel process for fabricating robust electrothermal bimorph based MEMS devices is reported and scanning electrothermal micromirrors are fabricated. Device parameters can be chosen to customize thermal response time and power requirements. Aluminum (Al) and Tungsten (W) form the active bimorph layers and polyimide is used for thermal isolation.
This paper reports a miniature optical coherence tomography (OCT) probe and high-resolution 3D OCT imaging results obtained with this probe. The probe is only 2.8-mm in diameter, enabled by a unique high-fill-factor electrothermal MEMS mirror with hidden actuators and a novel wire-bonding-free (WBF) packaging technique. The MEMS mirror has a large mirror aperture of 1 mm with a chip size of only 1...
Microelectromechanical systems (MEMS) devices have the advantages of small size, fast speed and low cost. MEMS-based miniature imaging probes have been developed for various optical ldquobiopsyrdquo imaging systems. These MEMS based optical imaging systems enable in vivo endoscopic optical ldquobiopsyrdquo, resulting in a paradigm shift of optical imaging of internal organs. In particular, MEMS based...
This paper presents the design, fabrication method and experimental results of electrothermal bimorph-actuated micromirror arrays with tip-tilt-piston capability, hidden actuators, and 88% area fill factor.
We report a miniature mirror-tilt-insensitive (MTI) Fourier transform spectrometer. A large-vertical-displacement (LVD) MEMS mirror is used to generate large scan range for high spectral resolution. The LVD MEMS mirror is also reflective on both surfaces. The maximum tilting angle of the MEMS mirror is 1.7deg for its entire 1-mm scan range. The combination of a corner-cube retroreflector and dual-reflective...
We report a novel dual-reflective MEMS mirror for full-circumferential-scanning (FCS) (360deg), forward-view endoscopic imaging applications. A unique electrothermal dual-folded-bimorph (DFB) actuator that can generate large rotation angles with a stationary rotation axis is employed. The fabricated devices demonstrate over 90deg mechanical rotation angles at frequencies up to 60 Hz with driving voltages...
This paper reports the design, fabrication and characterization of a 4x4 micromirror array consisting of piston-tip-tilt electrothermal MEMS mirrors. Each mirror has an optical aperture size of 0.5x0.5 mm2. Both tip and tilt angles of over plusmn30deg are obtained at less than 5 Vdc, and the piston displacement reaches 215 mum at 4 Vdc. Two-dimensional scanning was demonstrated. Thermal analysis and...
This paper reports a MEMS-based forward scanning endoscopic microprobe. The microprobe has a 2-D electrothermal micromirror embedded. The diameter of the probe is 5 mm. Two-photon excited fluorescence (TPEF) imaging with 5 mum resolution has been obtained.
This paper reports the design, fabrication and characterization of a novel lateral-shift-free (LSF) large-vertical-displacement (LVD) electrothermal actuator. Both micromirror and microlens holder based on the actuator design have been fabricated by a combined surface- and bulk- micromachining process. A 0.62 mm vertical displacement has been demonstrated at only 5.3 Vdc for a fabricated 0.8 mm by...
A new electrothermal micromirror with large piston and tilt motions was proposed and fabricated. Large initial tilt angles and optical path shifting of previously fabricated thermal micro mirrors were eliminated by employing inverted-series-connected (ISC) bimorph actuators
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