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In this paper, an inertial transducer developed in bulk and etch silicon-on-insulator microelectromechanical-system technology is presented. The device is suitable for low-frequency observation and could represent an interesting solution to implement low-cost monitoring systems for applications requiring a large number of monitoring sites and disposable devices. In particular, the sensor design and...
In this paper an inertial transducer developed in BESOI MEMS technology is presented. The device is suitable for low frequency observation and could represent an interesting solution to implement low cost monitoring system for applications requiring a high amount of monitoring sites and disposable devices. In particular, the sensor design and the technology adopted are presented here along with models...
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