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This paper presents a robust triangular-electrode based (TEB) capacitive detection method for MEMS gyroscopes. The TEB method utilizes the inherent nonlinearity of TEB variable-area sense capacitor to measure the amplitude and the phase of mechanical motion, and the derived amplitude and phase are independent of such system parameters as the carrier voltage, the nominal sense capacitance, the gain...
This paper reports a comparative study between double side-band (DSB) and single side-band (SSB) demodulation methods when applied to a general control system of MEMS gyroscopes. Theoretical analysis originally reveals the influence of phase delay variations of C/V sensing circuit in the drive loop on gyroscope output. A simulation is set up to evaluate the two demodulation algorithms, demonstrating...
In this work, we systematically investigate the nonlinear phenomenon of an electrostatic comb driven micro scanning mirror. The system governing equation is illustrated by Mathieu equation. A numerical model is built in MatLab based on the governing equation. The scanning mirror response in both time and frequency domain is simulated. Results are verified by the investigation vehicle, a fabricated...
Variable-area capacitor with tuning capability is used to control the drive mode of MEMS gyroscopes for constant-frequency oscillation. The proposed control approach tunes the drive axis natural frequency to a preselected frequency and regulates the amplitude of the drive axis vibration. The algorithm mainly implemented using a field-programmable-gate-array (FPGA) is tested on a MEMS gyroscope operating...
The design, fabrication and characterization of an electrostatic-type bi-axial MEMS scanning mirror operating with inter-digitated comb fingers are presented. The effect of comb offset on device actuation is examined. In addition to standard designs with and without comb offset, a novel asymmetric mirror plate was designed to introduce an imbalance. It was found that all the three designs can be actuated...
An accurate and effective finite element method (FEM) based model for the MEMS electrostatically actuated 2D resonant scanning mirror is presently reported to analyze and predict the mirror's performance which has highly nonlinearity. The simulated transient responses of the mirror showed good matches with the experimental results. The hysteretic frequency response can also be predicted by the model...
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