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In this paper, an indirect decoupling method is established to simulate the physical process of an electromagnetic launch considering electromagnetic force, thermo-softening of metallic material, and melting interface layer effects. The dynamic responses of cambered surface rail and armature under electromagnetic and thermal loads are analyzed and a simulation method is provided for the engineering...
Diamond-like carbon (DLC) films which contain a mixture of sp2 and sp3 hybridizations are widely used as a protective layer against wear and corrosion in hard disk drives (HDDs) due to their outstanding mechanical and tribological properties such as high hardness, low friction coefficient and excellent chemical durability [1]. The typical thickness of DLC film in HDD is approximately 1-2nm. For such...
This paper presents a compact silicon-photonic based optical cross connect (OXC) driven by the optical gradient force. Each switch element consists of a waveguide-crossing-coupled micro-ring resonator and a suspended arc. The device is fabricated with a standard CMOS compatible process using deep-UV 248-nm lithography with a double-etch technique. A switching time of 0.24 µs is experimentally demonstrated...
We develop a miniaturized electrostatically tunable optomechanical oscillator, whose frequencies can be electrostatically tuned by as much as 10%. By taking advantage of the optical and the electrical spring, the oscillator achieves a high tuning sensitivity without resorting to mechanical tension. Particularly, the high-Q optical cavity greatly enhances the system sensitivity, making it extremely...
This paper presents an optical force driven nano-machined actuator and the “pull-back” effect of a free-standing arc in an opto-mechanical ring resonator system. This nano-actuator obtains a maximal central displacement of 43.1 nm, with an actuation resolution of 0.28 nm, via tuning the wavelength of the control light at a fixed optical power of 2.8 mW. The “pull-back” effect occurs at the maximal...
Microparticle trapping and manipulation using the optical force in double coupled ring resonator (DCRR) through wavelength tuning is reported in this paper. The DCRR consists of two coupled identical rings, and a waveguide that is side-coupled to the two rings. The microparticles are propelled by optical radiation force and trapped by optical gradient force, which are both generated by the evanescent...
This paper presents a Nano-opto-mechanical actuator, which is driven by optical radiation force. The actuator consists of two waveguides, two identical ring resonators, and an actuator with Bragg reflector. Light is injected into the waveguides and coupled to the Bragg reflector via the ring resonator. The actuator is displaced by the optical force. The achieved maximum displacement of the actuator...
This paper reports a silicon-based micromachined optical power detector with on-chip measurement ability. The optical power is detected by an integrated electron-tunneling displacement transducer, in which optical force is employed as the bridge between optical energy and mechanical energy transition. Compared with the traditional optical power detectors, which are based on photo absorption, the proposed...
This work presents an opto-mechanical linear actuator utilizing the gradient optical force between two identical parallel waveguides. The actuator size shrinks to nanoscale dimensions. Theoretical study shows that the actuator deflection is controlled over optical signals and linearly proportional to the applied optical power. Such optical actuator takes full advantages of the nanotechnology, and...
This paper presents a pressure sensor array based on optical force using Nano-opto-mechanical Systems (NOMS). It consists of a deformable diaphragm and a waveguide array. When pressure is applied on the diaphragm, the gap between the diaphragm and the waveguide is reduced. The induced optical force deforms the waveguide and change the optical loss. In the experiment, it measures up to 32 dB optical...
In this paper, an optical switch driven by the optical force is demonstrated based on Nanoelectromechanical system (NEMS) technology. The switch consists of a Mach-Zehnder interferometer (MZI) and a ring resonator. One of the MZI arms is suspended to enable optical switching by optical force induced displacement. The optical force is introduced by injecting a control light into the ring resonator...
In this paper, a Nano-opto-mechanical (NOM) switch is designed, simulated and experimentally demonstrated, using the electromagnetically induced transparency (EIT)-like effects of coupled-ring resonator. The control of the switch is realized by optical force between the silicon waveguide and the dielectric substrate. As the injection pump power increases from 0 to 6 mW, the normalized power of transmission...
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