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The concept of MEMS sensors directly fabricated on a ceramic substrate, which can be used for a package of end product, was proposed. A micro accelerometer utilizing a fringe capacitance formed in a ferroelectric substrate was focused on. For this sensor, in stead of a previously used bulk PZT plate, a screen-printed BaTiO3 (BTO) film on an alumina substrate was employed in this study. A screen-printing...
Current-induced breakdown phenomena of carbon nanofibers (CNFs) for future on-chip interconnect applications are presented. The effect of heat dissipation via the underlying substrate is studied using different experimental configurations. Scanning electron microscopy (SEM) techniques are utilized to study the structural damage by current stress. While the measured maximum current density in the suspended...
To carry out a systematic reliability study of carbon nanofibers (CNFs) under high-current stress, detailed electrical analysis of CNF breakdown is performed on four configurations using current annealing. This investigation can be described with a heat transport model that takes into account Joule heating and heat dissipation along the CNF, and assuming that breakdown occurs where the temperature...
Current-induced breakdown phenomena of carbon nanofibers (CNFs) for future on-chip interconnect applications are presented. The effect of heat dissipation via the underlying substrate is studied using different experimental configurations. Scanning electron microscopy (SEM) techniques are utilized to study the structural damage by current stress. While the measured maximum current density in the suspended...
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