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This work examines two challenges facing the commercialization of boron diffused crystalline silicon solar cells - unintentional iron contamination and the passivation of a textured boron diffused surface. We find that when Fe is introduced into silicon wafers by boron diffusion, the Fe often remains trapped in the boron surface layer and undetectable using bulk lifetime measurements. However this...
Atomic Layer Deposition (ALD) has successfully been applied to advanced microelectronic applications importantly for conformal coatings on high aspect ratio devices. However, traditional ALD is limited in deposition rate because the ability to bring precursors rapidly to the surface. In this paper we review recent results for precursor delivery using advanced vaporization (Trijet) as well as recent...
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