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This paper presents a reduced order model including the resonator and the mechanical moment induced by the thin film on the resonator. The model development is presented as well as its experimental validation with four magnetometer prototypes. This model is then used to investigate the optimization of the thin film position on the resonator as well as the advantages of various shapes of resonators.
This paper presents the development of a high resolution, low power consumption and miniature seismometer sensor node for unattended ground sensors network dedicated to intruder detection in a guarded area. It is based on a quartz MEMS vibrating beam seismometer that is presented, as well as the signal processing for target detection, localization and identification, and finally experimental results...
The development of a high resolution MEMS inclinometer is presented. First the design of the inclinometer based on the integration of three quartz vibrating beam accelerometers is shown, then experimental results are shown concerning the resolution. This new inclinometer will enable new applications such as guidance of micro UAVS or structural health monitoring.
This paper presents the preliminary work to demonstrate the feasibility of a miniature resonator based magnetometer. This magnetometer consists of a thin film of ferromagnetic material sputtered on a cantilever with a magnetic moment aligned along the length of the cantilever. As the resonator vibrates under a magnetic field, the magnetostatic interaction induces a torque on the cantilever that stiffens...
The Vibrating Beam Accelerometer (VBA) consists in a vibrating micro beam anchored on one side and linked to a proof mass on the other side. The beam is maintained at resonance by means of an oscillator circuit, and when the proof mass is submitted to acceleration, compressive or tensile stresses are applied on the vibrating beam modifying its resonance frequency. The output of the accelerometer is...
MEMS frequency references and MEMS vibrating sensors, based on a resonator vibrating at its resonance frequency, offer interesting prospects in terms of miniaturization, cost and precision but their design optimization is difficult because multiple physical domains must be taken into account, as well as the associated nonlinearities that limit the carrier power. Once the model is set up, the simulation...
MEMS oscillators offer interesting prospects in terms of performance. Behavioural modelling in Verilog-A and phase noise simulation can help improving the current performances. The proposed macro-model permits multi-physic simulations including mechanical, piezoelectric and electrical analytic descriptions. Phase noise analysis are then performed with this model and compared to the standard Leeson...
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