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Geophysical prospecting for petroleum exploring and nature disaster forecasting depend on the broadband seismic sensors. Broadband electrochemical seismic sensor has superior performance such as high sensitivity at low frequency and no mechanical noise. These advantages make it widely used in seismology. This paper firstly studied the effect of the elasticity coefficient of the spring on the frequency...
Hermetic or vacuum packaging to maintain a controllable cavity pressure and low costs are required by many MEMS devices having moving parts. A novel fabrication technology using micro glass cavities for wafer level hermetic MEMS packaging including accelerometer or gyroscope will be presented. The micro cavities were fabricated by a hot-forming process using Pyrex 7740 since its coefficient of thermal...
A novel foaming process to fabricate wafer-level micro glass objects including bubbles and runners for MEMS packaging was studied. Firstly shallow cavities were wet etched fast on the surface of a silicon wafer. CaCO3 powders were placed in the silicon cavities. Then the cavities were sealed with a glass wafer by anodic bonding. The bonded wafers were then heated up, and the gas released by CaCO3...
Hermetic or vacuum packaging to maintain a controllable cavity pressure and low costs are required by many MEMS devices having moving parts. In this paper we propose a hot-forming process of fabricating micro glass cavity arrays for wafer-level and hermetic packaging of MEMS. First, the principle of the hot-forming process was discussed. Then, the hot-forming process for preparing cavity arrays in...
A MEMS-based solid propellant micro-thruster is presented in this paper. The prototypes with 4times4, 6times6 and 8times8 propulsion elements are designed, fabricated and tested. Cr is used as ignition resistor material in the ignition layer, which hasn't been reported by other researchers. Compared with the ignition resistors fabricated by poly-silicon or noble metal Pt, the Cr resistor has lower...
With the advances of MEMS, low-power analog and digital electronics, and low-power RF design, the design of wireless sensors has been developed rapidly. The advances of wireless sensors have enabled wireless sensor networks which are deployed to collect useful information from an area of interest. Because of the energy restriction of wireless sensors, the problem to extend the lifetime of wireless...
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