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We present a demonstration of a whole-angle mode operation of a 0.6 mm single-crystal silicon disk resonator gyroscope (DRG). This device has a Q factor of ~80,000 and a resonant frequency of ~250 kHz and is fabricated in the epi-seal process. Discrete-time control algorithms for rate-integrating gyro operation were implemented based on Lynch’s algorithm. Despite the fact that this DRG is over 5 orders...
In this paper, we show two methods for modifying the design of a Disk Resonating Gyroscope (DRG) to compensate for the mechanical anisotropy in single crystal silicon. This method is validated through experimental characterization of more than 70 different devices. With the proposed methods, the frequency split of the 250kHz DRG “wineglass” modes in single crystal silicon was reduced from >10kHz...
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