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Recently, with the maturity of cloud services and the development of distributed computing, increasing images and video data are stored in the cloud. However, cloud services are generally provided by the third party entities. In addition, the images and video which are stored in the cloud mostly depend on the security of the cloud servers, while the data are not encrypted, which is a great threat...
This paper presents a novel thermal tunable bulk-micromachined optical filter. The device has been achieved based on a Fabry-Perot interferometer employing a bulk silicon cavity and high-reflectivity coating (HRC). A dense boron doped silicon resistor has been used as the heater and the cantilever structure has been designed to provide a good thermal isolation. The tunable optical filter has been...
In this paper, we propose and demonstrate a novel micro-mirror array. The Micro-mirror structure with terraced electrodes was simulated with the aid of CoventorWare and the simulation results show that the micro-mirror can obtain a required tilted angle. Si-Si bonding technology is used for fabricating the Micro-mirror array and an array with high Fill factor of 97% has been achieved.
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