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This paper outlines the microfabrication processes and materials used to make an optofluidic lab-on-a-chip biosensor that detects individual biological particles. The biosensor uses a hollow-core ARROW waveguide with a low refractive index liquid core and is fabricated on a silicon wafer using a combination of PECVD deposition, RIE etching, and standard photolithographic processes. As a sensing example,...
Amplification-free nucleic acid testing using molecular beacon detection on an optofluidic chip is reported. A limit of detection at the single molecule detection level (10pM) and excellent specificity (single nucleotide mismatches) is observed.
Selective deposition of dielectric thin films on an optofluidic biosensor provides the means for low loss in hollow-core waveguides and increased solid- to hollow-core coupling. Polymethylglutarimide (PMGI) is used over nonplanar topographies to provide liftoff patterning of dielectric films deposited at temperatures up to 250°C . This fabrication method provides throughput improvement in devices...
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