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This paper presents an innovative technique of integrating silica nanowires to photoresist-derived carbon microelectromechanical systems (C-MEMS) on silicon substrate. The silica nanowires were synthesized through thermal treatment in a tube furnace at 1200 °C under a gaseous environment of N2 and H2. The stiff morphology and radicalized distribution around carbon posts of nanowires was observed,...
The 3-D carbon micro-electrode array, have been designed and simulated for dielectrophoretic manipulation of nanoparticles in fluids. The effects of electrode shape, applied voltage, electrode spacing and geometric size of the electrodes on the gradient in the electric field intensity is considered. Results show that the magnitude in the gradient in the electric field intensity produced by square...
This paper describes a new method to improve adhesion between high-aspect-ratio carbon micro/nano-structure and silicon substrate by micromechanical interlocking over conventional carbon micro-elecro-mechanical system (C-MEMS) process. Anisotropic wet chemical etching using potassium hydroxide (KOH) solution and aqueous tetramethyl ammonium hydroxide (TMAH) is applied to form various aspect-ratio...
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