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We develop a miniaturized electrostatically tunable optomechanical oscillator, whose frequencies can be electrostatically tuned by as much as 10%. By taking advantage of the optical and the electrical spring, the oscillator achieves a high tuning sensitivity without resorting to mechanical tension. Particularly, the high-Q optical cavity greatly enhances the system sensitivity, making it extremely...
We present a novel label-free bio-photonic sensing system based on silicon opto-electric integrated circuit (OEIC) platform. The sensing system comprises an electrical-tracing assisted microring and a sensor microring integrating with an on-chip photodetector for direct electrical read-out. Multiplexing is achieved through an array of microrings and integrated photodetectors. Such sensing system circumvents...
This paper presents an optical force driven nano-machined actuator and the “pull-back” effect of a free-standing arc in an opto-mechanical ring resonator system. This nano-actuator obtains a maximal central displacement of 43.1 nm, with an actuation resolution of 0.28 nm, via tuning the wavelength of the control light at a fixed optical power of 2.8 mW. The “pull-back” effect occurs at the maximal...
Optically enabled accelerometers offer superior displacement resolution and resilience to electromagnetic interference, which brought benefits to a wide range of applications ranging from inertial navigation to consumer electronics [1, 2]. However, impossible chip scale integration hampered their practical applications [2]. In this paper, a novel in-plane opto-mechanical accelerometer is demonstrated,...
This paper presents a Nano-opto-mechanical actuator, which is driven by optical radiation force. The actuator consists of two waveguides, two identical ring resonators, and an actuator with Bragg reflector. Light is injected into the waveguides and coupled to the Bragg reflector via the ring resonator. The actuator is displaced by the optical force. The achieved maximum displacement of the actuator...
This paper presents a MEMS switchable optical delay line, which works at terahertz (THz) region. The geometry of the unit cell is tunable by MEMS actuators [1]. In the experiment, it measures that the round trip time of the 5-µm silicon-metal cavity with the metamaterial slab is delayed by a factor of 100 when the gap of the metamaterial unit cell is shifted from 4 µm to 8 µm. Compared with the traditional...
This work presents an opto-mechanical linear actuator utilizing the gradient optical force between two identical parallel waveguides. The actuator size shrinks to nanoscale dimensions. Theoretical study shows that the actuator deflection is controlled over optical signals and linearly proportional to the applied optical power. Such optical actuator takes full advantages of the nanotechnology, and...
This paper presents a pressure sensor array based on optical force using Nano-opto-mechanical Systems (NOMS). It consists of a deformable diaphragm and a waveguide array. When pressure is applied on the diaphragm, the gap between the diaphragm and the waveguide is reduced. The induced optical force deforms the waveguide and change the optical loss. In the experiment, it measures up to 32 dB optical...
In this paper, an optical switch driven by the optical force is demonstrated based on Nanoelectromechanical system (NEMS) technology. The switch consists of a Mach-Zehnder interferometer (MZI) and a ring resonator. One of the MZI arms is suspended to enable optical switching by optical force induced displacement. The optical force is introduced by injecting a control light into the ring resonator...
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