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In this research, 94GHz microstrip antenna and rectifier was developed by MEMS technology for high power wireless power transfer system. To reduce the fabrication cost, a finline was also developed for RF power transmission from the wave guide to the microstrip line. As a result, the reflection loss was less than 1% and the antenna gain was 1.85 dBi. The rectifying efficiency was 38% with 105mW input...