The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
Selective absorption of nonstoichiometric silicon nitride (SixNy) thin films on silicon substrates was studied by infrared (IR) spectroscopy in the region of wavenumbers 500–7500 1/cm. For the transmission and reflection spectra of SixNy layers of various thicknesses the analysis of the absorption band of the Si-N stretching vibrations in the region 700–1100 1/cm with the peak at 820–900 1/cm was...