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Self-heating effects (SHEs) were studied on the vertical nanoplate-shaped gate-all-around (GAA) FETs (vNPFETs) as a target of 5nm node technology. The thermal properties are compared between face-up and face-down configuration. Decreasing the channel width is vulnerable to both configurations in terms of SHEs due to the reduced area of heat dissipation. It is well known that the SHE is alleviated...
Accurate evaluation of Self Heating Effects in highly down-scaled devices becomes essential for improved performance and reliability. However, complex structure of BEOL causes analysis of SHEs to be difficult To remove the difficulty, based on Rent's rule to obtain interconnect density function, effective thermal conductivity of BEOL versus metal volume density and average aspect ratio (p) was calculated...
A positive feedback (PF) mechanism was adopted for the first time in the cell string of a 3-D NAND flash memory where n+ and p+ regions are formed on both ends of the string to implement a diode-type cell string. The body consists of a tube-type poly-Si channel. To generate the PF in the channel during a read operation, a new read operation scheme is proposed. In this paper, the simulator was calibrated...
In this paper, dynamic Vpass ISPP schemes and optimizing Vth of erase cells are presented for achieving high program inhibition of sub-40nm MLC NAND flash and beyond. Compared to conventional method, over 40% program failure reduction after 30k P/E cycling was achieved in the proposed scheme. By optimizing erase Vth and its distribution using ISPP-after-erase, about 2 times better Vpass window margin...
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