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This paper presents a model-based ultra-precision stage control that utilizes a contact-type non-resonant ultrasonic actuator. The linear actuator is the synchronous piezoelectric device driver (SPIDER), which has the strong non-linearity due to the friction drive mechanism. Therefore, the friction characteristics are at first experimentally evaluated. Next, focusing on the non-linear property of...
In this paper, a design method of the reaction force control system for ultra-precision stage which equips vibration control system, is proposed. Taking the application to semiconductor manufacturing into consideration, the designed system deals with both the reaction force due to the stage movement and the vibration from the external environment. The experimental setup for a 6-degree of freedom (DOF)...
In the manufacturing industry especially in the semiconductor, the requirement for high-speed, fast-response and high-precision performances is critical. In this paper, the model predictive control is introduced to the positioning control of ultra-precision stage driven by a linear actuator. The linear actuator is the non-resonant ultra-sonic motor (SPIDER) which has the strong non-linearity due to...
In recent years, a high-precision stage control has received great attention due to the progress of nano-technology. A fast-response and high-precision control method based on the internal model control in the case where the controlled object has the integral characteristic is reported. The disturbance observer-based internal model control (DIMC) system has the advantages of no-overshoot, easy-design...
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